Mikroplasmas

Microwave plasma generation, particularly in the 2.45 GHz ISM band, enables a variety of new applications in medicine, biology, semiconductor industry and industrial surface engineering. The field of low-pressure plasma processing, which is widely used in industry, is permanently demanding for refinements and improvements in terms of quality, efficiency and cost. Additionally, the new emerging field of atmospheric microplasmas is gaining more and more attention due to its high potential in creating new plasma applications as well as the chance to transfer low-pressure plasma applications to much more cost-effective atmospheric processes.

In both fields, application of microwave frequencies is currently limited. The magnetron microwave sources used today are only available at power levels above 300 W, and feature problems to transmit the microwave energy from generator to plasma. Thus, there is a need for integrated, solid-state based systems consisting of generator and electrodes, which are reliable and can be easily integrated into applications. The potential of high-dense atmospheric microwave plasmas can only be harnessed if small and integrated plasma sources become available. Therefore, the FBH offers customized solutions. 

Atmospheric plasma sources

These are plasma sources which can be operated under atmospheric pressure and therefore do need no vacuum technology. Herewith, many tasks for which low-pressure plasmas are used nowadays can be accomplished much more cost efficient. Some new applications, e. g. medical plasma treatment become only accessible with atmospheric plasma technology. 

• Source design
  The FBH evaluates several concepts of plasma sources and power oscillators.
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• Charakterization
  The plasma sources developed at FBH are electrically characterized, spectroscopically analyzed and investigated with respect to the plasma chemical impact. 
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• Applications
  There are many applications for atmospheric plasma sources, several of them being currently developed in cooperation with partners. 
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Light sources

Microwave plasmas can make an important contribution to energy-efficient lighting. Microwaves enable the design of electrodeless plasma light sources, which extends life time and opens up new possibilities to optimize light efficiency and optical spectrum by variations of the gas composition.