Microplasmas

Microvave plasma generation, particularly in the 2.45 GHz ISM band, enables a variety of new applications in medicine, biology, semiconductor industry and industrial surface engineering. The field of low-pressure plasma processing, which is widely used in industry, is permanently demanding for refinements and improvements in terms of quality, efficiency and cost. On the other hand, the new emerging field of atmospheric microplasmas is gaining more and more attention due to its high potential in creating new plasma applications as well as the chance to transfer low-pressure plasma applications to much more cost-effective atmospheric processes.

In both fields, application of microwave frequencies today is limited by shortcomings of the available magnetron power-sources and by the problems associated with the microwave transmission from the source into the plasma. There is a need for an integrated semiconductor-based power source – electrode systems that are reliable and can be easily integrated in application systems. Particularly the high potential of efficient high-density atmospheric microplasma sources can be addressed only if small integrated sources become available. Thus, this field represents an interesting application and extension of the FBH activities on microwave III-V power components.