Backend

The Backend & PCM group links the processing of semiconductor devices on wafer level to the frontend work group and the packaging groups of the optoelectronic and microwaves department.

Process modules

  • Laser micro processing
  • Back-side thinning
  • Back-side process RF devices

DC Device Characterization

Wafer seperating techniques

  • Dicing
  • Scribe and break

Contact

Dr. Steffen Knigge
 Phone +49.30.6392-2665
 Fax +49.30.6392-2685
 Email steffen.knigge(at)fbh-berlin.de