In the front-end of line all process modules for the production of components at wafer level are realized. The flexible process line in clean room environment of up to class ISO 5 allows for processing of wafers in a batch of different sizes and retail operations. Wafers are processed using automated processing equipment.
The following standard process modules are available:
- Photolithography, Electron beam lithography
- Etching techniques
- Deposition methods
- Ion implantation