DC Measurement

For characterization of layers and monitoring of process steps electrical measurements are performed on test structures (PCMs = Process control monitors) and testing devices (ig special transistors). Typically, the results are depicted as a distribution of parameters or characteristics across the wafer (maps).

Equipment: 

  • 2 semi automatic waferprobers
  • Probe cards with up to 18 probes
  • Coplanar probes
  • Current resolution <100 pA  
  • DC wafer prober
    [+] DC wafer prober
  • Sheet resistance distribution
    [+] Sheet resistance distribution over a 3 inch GaN/SiC-wafer