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Transferred Substrate DHBT of ft = 410 GHz and fmax = 480 GHz for Traveling Wave Amplifiers
T. Krämer1, C. Meliani1, F. Lenk2, J. Würfl1, G. Tränkle1
1 Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, D-12489 Berlin, Germany
2 Fachhochschule Lausitz, 01968 Senftenberg, Germany
Published in:
Conference Digest IPRM08 (2008).
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Abstract:
We report a MMIC process in transferred
substrate technology. The transistors of
0.8 × 5 µm2 emitter size feature ft = 410 GHz
and fmax = 480 GHz at BVceo = 5.5 V. Traveling
wave amplifiers of 12 dB broadband gain up to
fc = 70 GHz were realized.
Keywords:
InP heterojunction bipolar transistor, transferred substrate,
wafer bonding, millimeter-wave, distributed amplifier
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