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An Integrated Atmospheric Microwave Plasma Source
R. Kovacs1, N. Bibinov2, P. Awakowicz2, H.-E. Porteanu3, S. Kühn3, R. Gesche3
1 Aurion Anlagentechnik GmbH, Am Sandborn 14, Seligenstadt, Germany
2 Ruhr-Universität-Bochum, Allg. Elektro- und Plasmatechnik, Universitätsstraße 150, 44797 Bochum, Germany
3 Ferdinand-Braun-Institut für Höchstfrequenztechnik, Gustav-Kirchhoff-Straße 4, 12489 Berlin, Germany
Published in:
Plasma Processes Polym., vol. 6, no. S1, pp. S233-S236 (2009).
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Abstract:
Atmospheric plasma processes become more and more popular in recent times. A new
integrated atmospheric plasma source is presented which consists of a microwave resonator
combined with a solid-state power oscillator. This allows for a very compact and efficient
design of a microwave plasma source without external microwave power supply and
matching units. Hydrophobic polymers have to be activated to ensure an effective painting
or glueing. The performance of this new plasma source has been investigated with respect to
surface activation depending on axial and radial distance to the substrate, process time,
process gas, and flow velocity. Several polymeric materials have been compared. Polyethylene,
polyamide, polystyrene, polypropylene, polycarbonate, and polytetrafluorineethylene show
good activation results. This tool can be used especially for bulky goods and/or mass products,
when a vacuum process is not possible or too expensive.
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